Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings

2.50
Hdl Handle:
http://hdl.handle.net/2173/107442
Title:
Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings
Authors:
Whitehead, Kathryn A.; Kelly, Peter; Li, Heqing; Verran, Joanna
Citation:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2010, vol. 28, no. 1, pp. 180 187
Publisher:
American Institute of Physics
Issue Date:
2010
URI:
http://hdl.handle.net/2173/107442
DOI:
10.1116/1.3293232
Additional Links:
http://www.avs.org/literature.jvst.b.aspx
Type:
Article
Language:
en
Description:
Full-text of this article is not available in this e-prints service. This article was originally published following peer-review in Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, published by and copyright American Institute of Physics.
ISSN:
1071-1023; 1520-8567

Full metadata record

DC FieldValue Language
dc.contributor.authorWhitehead, Kathryn A.en
dc.contributor.authorKelly, Peteren
dc.contributor.authorLi, Heqingen
dc.contributor.authorVerran, Joannaen
dc.date.accessioned2010-07-09T13:26:49Z-
dc.date.available2010-07-09T13:26:49Z-
dc.date.issued2010-
dc.identifier.citationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2010, vol. 28, no. 1, pp. 180 187en
dc.identifier.issn1071-1023-
dc.identifier.issn1520-8567-
dc.identifier.doi10.1116/1.3293232-
dc.identifier.urihttp://hdl.handle.net/2173/107442-
dc.descriptionFull-text of this article is not available in this e-prints service. This article was originally published following peer-review in Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, published by and copyright American Institute of Physics.en
dc.language.isoenen
dc.publisherAmerican Institute of Physicsen
dc.relation.urlhttp://www.avs.org/literature.jvst.b.aspxen
dc.titleSurface topography and physicochemistry of silver containing titanium nitride nanocomposite coatingsen
dc.typeArticleen
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