MMU Home | Prospectus | About MMU | A-Z Index | Contacts 

mmuch more
Collection All
Listed communities

espace at MMU > Research Institutes > Dalton Research Institute > Material Science > A comparison of titanium-based films produced by pulsed and continuous DC magnetron sputtering

Please use this identifier to cite or link to this item:     LinkedIn     Citeulike     Connotea     Facebook     Stumble it!

SFX Query

Title: A comparison of titanium-based films produced by pulsed and continuous DC magnetron sputtering
Authors: Kelly, Peter
Beevers, C. F.
Henderson, P.
Arnell, R. D.
Backer, H.
Bradley, J. W.
Citation: Surface and coatings technology, 2003, vol. 174/175, pp. 795-800
Publisher: Elsevier
Issue Date: Sep-2003
DOI: 10.1016/S0257-8972(03)00356-6
Additional Links:
Abstract: In the field of magnetron sputtering, it is well established that mid-frequency (20–350 kHz) pulsed processing offers many advantages over continuous DC processing for the reactive deposition of dielectric films. By periodically reversing the target voltage, arc events at the target are suppressed and the reactive sputtering process is stabilised. However, recent studies have shown that pulsing the discharge also significantly modifies the characteristics of the magnetron plasma. Specifically, increased plasma density and electron temperatures, and therefore increased ion energy fluxes to the growing film, have been measured. Clearly, this will have an impact on the properties of both insulating and conductive films. In this study, therefore, titanium dioxide and titanium nitride coatings were deposited by pulsed (asymmetric bipolar, 20-kHz pulse frequency) and continuous DC reactive sputtering. The coatings were characterised in terms of their structures and properties using a range of analytical and measurement techniques, including scanning electron microscopy, electron probe microanalysis, X-ray diffraction, micro-hardness testing, scratch adhesion testing, wear testing and surface profilometry. The optical properties of the TiO2 films were also investigated. In this case, the pulsed films showed increased refractive index and peak transmission values in comparison to the DC films, while the tribological properties of both coating types were superior when pulsed processing was used in comparison with continuous processing.
Type: Article
Language: en
Description: Full-text of this article is not available in this e-prints service. This article was originally published [following peer-review] in Surface and Coatings Technology, published by and copyright Elsevier.
Keywords: Titanium-based films
DC magnetron sputtering
Film properties
ISSN: 0257-8972
Appears in Collections: Material Science

Files in This Item:

There are no files associated with this item.

All Items in e-space are protected by copyright, with all rights reserved, unless otherwise indicated.


OR Logo Powered by Open Repository | Cookies
Valid XHTML 1.0!